Negative-ion surface production in hydrogen plasmas: Determination of the negative-ion energy and angle distribution function using mass spectrometry

标题
Negative-ion surface production in hydrogen plasmas: Determination of the negative-ion energy and angle distribution function using mass spectrometry
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 119, Issue 19, Pages 193301
出版商
AIP Publishing
发表日期
2016-05-22
DOI
10.1063/1.4948949

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