Nanosecond laser-assisted micro-scribing of a copper film on a dielectric material with laser-induced breakdown spectroscopy based monitoring
出版年份 2021 全文链接
标题
Nanosecond laser-assisted micro-scribing of a copper film on a dielectric material with laser-induced breakdown spectroscopy based monitoring
作者
关键词
Pulsed laser, Micro-scribing, Copper, Dielectric substrate, LIBS, Online monitoring
出版物
OPTICS AND LASER TECHNOLOGY
Volume 147, Issue -, Pages 107685
出版商
Elsevier BV
发表日期
2021-11-24
DOI
10.1016/j.optlastec.2021.107685
参考文献
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