Imaging of simulated muscle based on single chip of AlN piezoelectric micromachined ultrasonic transducer

标题
Imaging of simulated muscle based on single chip of AlN piezoelectric micromachined ultrasonic transducer
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 32, Issue 7, Pages 075003
出版商
IOP Publishing
发表日期
2022-05-18
DOI
10.1088/1361-6439/ac70a6

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