Development of a Probe System for Measuring the Plasma Parameters and the High-Energy Part of the Electron-Energy Distribution Function

A probe system has been developed on the basis of an external ADC/DAC module (ADC is the analog-to-digital converter and DAC is the digital-to-analog converter). Using this system, it is possible to determine all the main plasma parameters of continuous and pulsed gas discharges. A program for the Windows operating system has been developed in C++ to control the probe system. The probe system can be used for diagnostics of plasma devices and can be included in modern microplasma analyzers of gas mixtures.

Automated summary

A probe system has been developed to determine plasma parameters of continuous and pulsed gas discharges, and can be used for diagnostics of plasma devices and included in microplasma analyzers of gas mixtures.