期刊
JAPANESE JOURNAL OF APPLIED PHYSICS
卷 55, 期 12, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.7567/JJAP.55.1202B7
关键词
-
资金
- JSPS [26709020, 16K13673]
- JGC-S Scholarship foundation
- Grants-in-Aid for Scientific Research [15H03881, 26709020, 16J09832, 15H03977, 16K13673] Funding Source: KAKEN
Sputter-deposited indium-tin oxide (ITO) electrodes became ohmic contacts for unintentionally doped beta-Ga2O3(010) substrates with a carrier concentration of 2 x 10(17)cm(-3) after rapid thermal annealing in a wide range of annealing temperatures of 900-1150 degrees C. The formation of an ohmic contact is attributed to interdiffusion between ITO and beta-Ga2O3, as evidenced by the results of transmission electron microscopy and energydispersive X-ray spectroscopy. The interdiffusion decreases the band gap and increases the donor concentration of beta-Ga2O3 at the interface, and forms an intermediate semiconductor layer desirable for carrier transport. The ITO ohmic contact is particularly useful for future beta-Ga2O3 devices operated at high temperatures. (C) 2016 The Japan Society of Applied Physics
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据