Influences of growth parameters on the film formation of hexagonal boron nitride thin films grown on sapphire substrates by low-pressure chemical vapor deposition

标题
Influences of growth parameters on the film formation of hexagonal boron nitride thin films grown on sapphire substrates by low-pressure chemical vapor deposition
作者
关键词
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出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 55, Issue 5S, Pages 05FD09
出版商
Japan Society of Applied Physics
发表日期
2016-04-20
DOI
10.7567/jjap.55.05fd09

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