Effect of nitrogen plasma on the mechanical and electrical properties of plasma-enhanced atomic layer deposited TiN films

Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells

(2020) Woo-Jae Lee et al.   APPLIED SURFACE SCIENCE

The role of plasma in plasma-enhanced atomic layer deposition of crystalline films

(2020) David R. Boris et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Control of ion energy during plasma enhanced atomic layer deposition: A new strategy for the modulation of TiN growth delay on SiO2

(2020) Samia Belahcen et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Remote plasma enhanced atomic layer deposition of titanium nitride film using metal organic precursor (C12H23N3Ti) and N2 plasma

(2020) Byunguk Kim et al.   APPLIED SURFACE SCIENCE

Tunable preparation of chrysanthemum-like titanium nitride as flexible electrode materials for ultrafast-charging/discharging and excellent stable supercapacitors

(2018) Xinmei Hou et al.   JOURNAL OF POWER SOURCES

Obtaining low resistivity (∼100 μΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor

(2018) Igor Krylov et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Energetic Ions during Plasma-Enhanced Atomic Layer Deposition and their Role in Tailoring Material Properties

(2018) Tahsin Faraz et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Preparation of TiOxNy/TiN composites for photocatalytic hydrogen evolution under visible light

(2015) Tao Yang et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Synthesis of titanium nitride nanopowder at low temperature from the combustion synthesized precursor and the thermal stability

(2014) Xinmei Hou et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Plasma Enhanced Atomic Layer Deposition of TiCxNyFilm with Various Reactive Gases

(2014) Gihee Cho et al.   ECS Journal of Solid State Science and Technology

Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient

(2008) Pierre Caubet et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Atomic layer deposition of titanium nitride from TDMAT precursor

(2008) J. Musschoot et al.   MICROELECTRONIC ENGINEERING

The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings

(2007) J. Wagner et al.   INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS