Fabrication of Through-glass Vias (TGV) based 3D microstructures in glass substrate by a lithography-free process for MEMS applications
出版年份 2022 全文链接
标题
Fabrication of Through-glass Vias (TGV) based 3D microstructures in glass substrate by a lithography-free process for MEMS applications
作者
关键词
Through-glass Vias (TGV), Electrochemical discharge machining, Electroless deposition, RF-MEMS, Electrodeposition, Glass
出版物
APPLIED SURFACE SCIENCE
Volume 584, Issue -, Pages 152494
出版商
Elsevier BV
发表日期
2022-01-25
DOI
10.1016/j.apsusc.2022.152494
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Numerical and experimental investigations into microchannel formation in glass substrate using electrochemical discharge machining
- (2019) Dileep Kumar Mishra et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Fabrication of multiple through-holes in non-conductive materials by Electrochemical Discharge Machining for RF MEMS Packaging
- (2019) Julfekar Arab et al. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
- Thin uniform nickel seed layer formation and its impact on Ni-Cu contact adhesion for c-Si solar cell applications
- (2017) Vishnu Kant Bajpai et al. SOLAR ENERGY
- Trends in Effective Diffusion Coefficients for Ion-Exchange Strengthening of Soda-Lime-Silicate Glasses
- (2017) Stefan Karlsson et al. Frontiers in Materials
- Palladium-free electroless deposition of pure copper film on glass substrate using hydrazine as reducing agent
- (2016) N. Nobari et al. APPLIED SURFACE SCIENCE
- Copper Plating on Glass Using a Solution Processed Copper-Titanium Oxide Catalytic Adhesion Layer
- (2016) Kyohei Okabe et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Electroless Nickel Plating – A Review
- (2016) C. A. Loto Silicon
- Electrochemical Copper Metallization of Glass Substrates Mediated by Solution-Phase Deposition of Adhesion-Promoting Layers
- (2015) Alexander Miller et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- 30 years of electroless plating for semiconductor and polymer micro-systems
- (2015) Y. Shacham-Diamand et al. MICROELECTRONIC ENGINEERING
- Design, Fabrication, and Characterization of Ultrathin 3-D Glass Interposers With Through-Package-Vias at Same Pitch as TSVs in Silicon
- (2014) Vijay Sukumaran et al. IEEE Transactions on Components Packaging and Manufacturing Technology
- Electroless nickel, alloy, composite and nano coatings – A critical review
- (2013) Jothi Sudagar et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Evolution of microstructure and electrical conductivity of electroless copper deposits on a glass substrate
- (2012) Xiaoyun Cui et al. THIN SOLID FILMS
- Electroless plating of copper on surface-modified glass substrate
- (2011) Wei Su et al. APPLIED SURFACE SCIENCE
- Study of Ni-catalyst for electroless Ni–P deposition on glass fiber
- (2011) Libo Li et al. MATERIALS CHEMISTRY AND PHYSICS
- Deep plasma etching of glass with a silicon shadow mask
- (2007) K. Kolari SENSORS AND ACTUATORS A-PHYSICAL
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