Fabrication of Through-glass Vias (TGV) based 3D microstructures in glass substrate by a lithography-free process for MEMS applications

标题
Fabrication of Through-glass Vias (TGV) based 3D microstructures in glass substrate by a lithography-free process for MEMS applications
作者
关键词
Through-glass Vias (TGV), Electrochemical discharge machining, Electroless deposition, RF-MEMS, Electrodeposition, Glass
出版物
APPLIED SURFACE SCIENCE
Volume 584, Issue -, Pages 152494
出版商
Elsevier BV
发表日期
2022-01-25
DOI
10.1016/j.apsusc.2022.152494

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