Design and analysis of new ultra compact decoupled XYZO stage to achieve large-scale high precision motion

A new high precision ultra-compact decoupled XYZO motion stage based on flexure hinges is designed and analyzed. The stage mainly consists of three components including serial-parallel dual-stage amplifier, Z-shape motion steering mechanism and motion decoupled mechanism. Compared with the existing stages, the proposed high precision motion stage has many advantages such as extremely compact structure, large output decoupling motion and XYZO four axes output displacement. The function of serial-parallel dual-stage amplifier is to amplify the travel range of nano positioning piezo actuator (PZT) by connecting two parallel bridge type mechanism. The Z-shape mechanism can change the direction of motion transmission to make the stage more compact and form movement in XYZO four directions. The decouple mechanism can reduce the implicative movement of different piezo actuators. Then, kinetostatic analysis of this new XYZO stage is conducted to analyze the stage. Finally, the finite-element analysis (FEA) and prototype experiments are implemented to verify the design objectives.

Automated summary

The new high precision ultra-compact decoupled XYZO motion stage designed with flexure hinges consists of three components: serial-parallel dual-stage amplifier, Z-shape motion steering mechanism, and motion decoupled mechanism. It offers advantages such as compact structure, large output decoupling motion, and XYZO four axes output displacement. The stage's kinetostatic analysis, finite-element analysis (FEA), and prototype experiments verify the design objectives.