Mechanical properties and deformation mechanisms of surface-modified 6H-silicon carbide

标题
Mechanical properties and deformation mechanisms of surface-modified 6H-silicon carbide
作者
关键词
Nanoindentation, Surface-modified 6H-SiC, Amorphous SiO, 2, film, Amorphization, Dislocation evolution, MD simulation
出版物
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
Volume 90, Issue -, Pages 58-65
出版商
Elsevier BV
发表日期
2021-04-24
DOI
10.1016/j.jmst.2021.02.028

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