Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification

出版年份 2021 全文链接

标题

作者

关键词

出版物

Volume 34, Issue 4, Pages 455-463

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2021-10-09

DOI

10.1109/tsm.2021.3118922

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