Gradient magnetron co-sputtered μm-thick Al–Si films on dielectric substrates for operation in the millimeter-wave band
出版年份 2021 全文链接
标题
Gradient magnetron co-sputtered μm-thick Al–Si films on dielectric substrates for operation in the millimeter-wave band
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 119, Issue 16, Pages 161906
出版商
AIP Publishing
发表日期
2021-10-20
DOI
10.1063/5.0058572
参考文献
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