期刊
ACS PHOTONICS
卷 8, 期 8, 页码 2400-2409出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsphotonics.1c00609
关键词
additive manufacturing; high-throughput manufacturing; nanostructures; metalenses; nanocrystal composites; UV curing
类别
资金
- National Science Foundation Center for Hierarchical Manufacturing [CMMI-1025020]
- Army Research Laboratories [HQ00341520007]
- DARPA Extreme Optics and Imaging program
- National Science Foundation [1541959]
The study presents a one-step additive manufacturing process for fabricating metalenses using nanoimprint lithography and a titanium dioxide nanocrystal-based imprint material. The metalenses produced exhibit a refractive index of 1.9 and show high numerical apertures and focusing efficiencies. The success of large area replication of metalenses using this process was also demonstrated.
We report a one-step additive manufacturing process to fabricate metalenses for visible wavelengths. Nanostructures with aspect ratios larger than eight and critical dimensions smaller than 60 nm were produced using nanoimprint lithography and a titanium dioxide nanocrystal-based imprint material, resulting in inorganic structures exhibiting a refractive index of n = 1.9. As a demonstration, we fabricate metalenses with numerical apertures (NAs) of 0.2 and focusing efficiencies over 50%. Manufacturability was assessed by performing 15 manual imprints in 30 min (2 min of process time per imprint) with a single stamp. All imprinted lenses exhibit comparable performance, paving the way for high-throughput and low-cost manufacturing of flat optical devices. Metalenses with a diameter of 4 mm were also fabricated to investigate the success of large area replication using this process, showing efficiencies of 43%, indicating good macroscopic imprinting.
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