Formation of inverse EDF in glow discharges with an inhomogeneous electric field

标题
Formation of inverse EDF in glow discharges with an inhomogeneous electric field
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 30, Issue 9, Pages 095006
出版商
IOP Publishing
发表日期
2021-08-17
DOI
10.1088/1361-6595/ac1df0

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