Piezoelectric P(VDF-TrFE) film inkjet printed on silicon for high-frequency ultrasound applications

We investigated the innovative processing of poly(vinylidene fluoride-trifluoroethylene) P(VDFx-TrFE1-x) (x=83mol.%) by inkjet printing to deliver uniform and thickness-controlled layers on silicon substrates. Here, we provide detailed processing steps and optimize film deposition conditions. The thickness coupling factor for a P(VDF-TrFE) film around 11 mu m thick was 22%, demonstrating good electromechanical performance after poling. These multilayer structures were specifically for high-frequency, single-element ultrasonic transducer applications. The measurements of electro-acoustic responses were in water. The maximal frequency was centered at 33.2MHz and had a fine axial resolution at 22 mu m, corresponding to a fractional bandwidth at -6dB of 100%. In the context of technological evolutions aimed at miniaturized devices and integrated electronics, these results allow for the consideration of complex structures such as multi-element transducers for high-frequency imaging applications.

Automated summary

The study focused on the innovative processing of P(VDFx-TrFE1-x) by inkjet printing on silicon substrates to achieve uniform and thickness-controlled layers. Detailed processing steps and film deposition conditions were provided and optimized, showing good electromechanical performance in 11μm thick P(VDF-TrFE) films. The research aimed at high-frequency ultrasonic transducer applications, with electro-acoustic responses measured in water, achieving a maximal frequency of 33.2MHz and a fine axial resolution at 22μm. These results allow for the consideration of complex structures such as multi-element transducers for high-frequency imaging applications in the context of technological evolutions towards miniaturized devices and integrated electronics.