Improved performance of transparent conductive Cu-based GZO multilayer thin films on flexible substrates via two Al2O3 layers and oxygen-containing atmosphere

标题
Improved performance of transparent conductive Cu-based GZO multilayer thin films on flexible substrates via two Al2O3 layers and oxygen-containing atmosphere
作者
关键词
Cu-based GZO multilayer thin films, Magnetron sputtering, Electrical and optical properties, Flexible substrate
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 874, Issue -, Pages 159949
出版商
Elsevier BV
发表日期
2021-04-21
DOI
10.1016/j.jallcom.2021.159949

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