Cu to Cu direct bonding at low temperature with high density defect in electrodeposited Cu

标题
Cu to Cu direct bonding at low temperature with high density defect in electrodeposited Cu
作者
关键词
Electrodeposition, Copper, Strain energy, Surface energy, Grain growth
出版物
APPLIED SURFACE SCIENCE
Volume 550, Issue -, Pages 149337
出版商
Elsevier BV
发表日期
2021-02-19
DOI
10.1016/j.apsusc.2021.149337

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