GISAXS and GISANS as metrology technique for understanding the 3D morphology of block copolymer thin films

标题
GISAXS and GISANS as metrology technique for understanding the 3D morphology of block copolymer thin films
作者
关键词
Block copolymer, Metrology, GISAXS, GISANS, Nanostructure
出版物
EUROPEAN POLYMER JOURNAL
Volume 81, Issue -, Pages 470-493
出版商
Elsevier BV
发表日期
2016-04-06
DOI
10.1016/j.eurpolymj.2016.04.007

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