Electrical breakdown in dual-frequency capacitively coupled plasma: A collective simulation

标题
Electrical breakdown in dual-frequency capacitively coupled plasma: A collective simulation
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
出版商
IOP Publishing
发表日期
2021-05-11
DOI
10.1088/1361-6595/abff74

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