期刊
出版社
ELSEVIER
DOI: 10.1016/j.nimb.2021.02.001
关键词
Ion beam implantation; Porous GaAs; SEM; XRD; XPS; Micro-Raman scattering
Porous GaAs materials were successfully fabricated by electrochemical etching of n-type GaAs (100) substrates implanted with iron ions, showing significant changes in both morphological characteristics and chemical composition of the formed porous layer due to the implantation process.
Porous GaAs were formed by electrochemical etching of n-type GaAs (100) substrates implanted by iron ion beam with energy of 2 MeV at low ion fluence of 7.8 x 10(+13) Fe++/cm(2). The influence of the implantation on morphological and structural properties of the formed porous GaAs was investigated using scanning electron microscopy (SEM), energy dispersive x-ray spectroscopy (EDS), X-ray diffraction (XRD), X-ray photoelectron spectroscopic (XPS) and micro-Raman scattering. It is shown that the implantation process leads to significant modifications in both the morphological aspects and the chemical constitution of the formed porous GaAs layer. XRD, Raman and XPS results revels that the porous layer formed on the un-implanted substrate has a Ga-oxide rich surface, while the one formed on the implanted substrate is highly passivated with As-oxide.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据