Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors
出版年份 2021 全文链接
标题
Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 31, Issue 6, Pages 065009
出版商
IOP Publishing
发表日期
2021-04-22
DOI
10.1088/1361-6439/abfa7f
参考文献
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