Preparation of transparent and hydrophobic cerium oxide films with stable mechanical properties by magnetron sputtering

标题
Preparation of transparent and hydrophobic cerium oxide films with stable mechanical properties by magnetron sputtering
作者
关键词
Cerium oxide, Transparent, Hydrophobic, Mechanical properties, Magnetron sputtering
出版物
VACUUM
Volume 184, Issue -, Pages 109888
出版商
Elsevier BV
发表日期
2020-11-19
DOI
10.1016/j.vacuum.2020.109888

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