期刊
ULTRAMICROSCOPY
卷 221, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.ultramic.2020.113130
关键词
Scanning probe microscopy; Image processing; Template matching; Correlative microscopy; Computer software
类别
资金
- Imperial College London
- HEIF through the Proof of Concept scheme
- EPSRC [EP/K034332/1]
- Royal Academy of Engineering
The paper describes TrueEBSD, an automatic postprocessing procedure for distortion correction with pixel scale precision, demonstrated on three case studies. By separating tilt and drift distortion components and fitting each to a distortion model, TrueEBSD enabled characterization of otherwise inaccessible microstructural features.
Electron backscatter diffraction (EBSD) in the scanning electron microscope is routinely used for microstructural characterisation of polycrystalline materials. Maps of EBSD data are typically acquired at high stage tilt and slow scan speed, leading to tilt and drift distortions that obscure or distort features in the final microstructure map. In this paper, we describe TrueEBSD, an automatic postprocessing procedure for distortion correction with pixel scale precision. Intermediate images are used to separate tilt and drift distortion components and fit each to a physically-informed distortion model. We demonstrate TrueEBSD on three case studies (titanium, zirconium and hydride containing Zr), where distortion removal has enabled characterisation of otherwise inaccessible microstructural features.
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