Experimental and theoretical study of the synthesis of N-doped TiO2 by N ion implantation of TiO2 thin films

标题
Experimental and theoretical study of the synthesis of N-doped TiO2 by N ion implantation of TiO2 thin films
作者
关键词
N-doped TiO, 2, Ion implantation, TRIDYN
出版物
APPLIED SURFACE SCIENCE
Volume 541, Issue -, Pages 148493
出版商
Elsevier BV
发表日期
2020-11-19
DOI
10.1016/j.apsusc.2020.148493

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