Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

标题
Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator
作者
关键词
-
出版物
SENSORS
Volume 20, Issue 24, Pages 7264
出版商
MDPI AG
发表日期
2020-12-21
DOI
10.3390/s20247264

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