Characterization of descriptors in machine learning for data-based sputtering yield prediction

标题
Characterization of descriptors in machine learning for data-based sputtering yield prediction
作者
关键词
-
出版物
PHYSICS OF PLASMAS
Volume 28, Issue 1, Pages 013504
出版商
AIP Publishing
发表日期
2021-01-12
DOI
10.1063/5.0006816

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