Out-of-plane motion detection in encapsulated electrostatic MEMS gyroscopes: Principal parametric resonance

Simulation of an electrically actuated cantilever as a novel biosensor

(2020) Masoud SoltanRezaee et al.   Scientific Reports

Nonlinear dynamic stability of piezoelectric thermoelastic electromechanical resonators

(2020) Masoud SoltanRezaee et al.   Scientific Reports

A resonant pressure MEMS sensor based on levitation force excitation detection

(2020) Mohammadreza Zamanzadeh et al.   NONLINEAR DYNAMICS

Lateral pull-in instability of electrostatic MEMS transducers employing repulsive force

(2020) Meysam Daeichin et al.   NONLINEAR DYNAMICS

Quasi-Static Pull-in: an Instability in Electrostatic Actuators

(2020) M. S. Al-Ghamdi et al.   Scientific Reports

Bifurcation-based MEMS mass sensors

(2020) Vamsi C. Meesala et al.   INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES

Bifurcation analysis of the levitation force MEMS actuators

(2020) M. Zamanzadeh et al.   INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES

Frequency locking in the internal resonance of two electrostatically coupled micro-resonators with frequency ratio 1:3

(2020) Xuefeng Wang et al.   MECHANICAL SYSTEMS AND SIGNAL PROCESSING

Bifurcation diagram and dynamic response of a MEMS resonator with a 1:3 internal resonance

(2019) David A. Czaplewski et al.   APPLIED PHYSICS LETTERS

Nonlinear structural behavior of a size-dependent MEMS gyroscope assuming a non-trivial shaped proof mass

(2019) Hassen M. Ouakad   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Theoretical and experimental investigations of the primary and parametric resonances in repulsive force based MEMS actuators

(2019) Mohammadreza Zamanzadeh et al.   SENSORS AND ACTUATORS A-PHYSICAL

An inherent nonlinear electrostatic actuator without any additional auxiliary to reduce pull-in voltage and extend travel range

(2018) Xiaojian Xiang et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Nondestructive gap dimension estimation of electrostatic MEMS resonators from electrical measurements

(2018) A. Brenes et al.   MECHANICAL SYSTEMS AND SIGNAL PROCESSING

Nonlinearity measurement for low-pressure encapsulated MEMS gyroscopes by transient response

(2018) Yumiao Wei et al.   MECHANICAL SYSTEMS AND SIGNAL PROCESSING

Pull-in-voltage and RF analysis of MEMS based high performance capacitive shunt switch

(2018) Osor Pertin et al.   MICROELECTRONICS JOURNAL

Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error

(2018) Jingjing Feng et al.   Micromachines

Dynamic bifurcation MEMS gas sensors

(2018) M S Al-Ghamdi et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process

(2018) Chunhua Cai et al.   Scientific Reports

Qualitative Identification of the Static Pull-In and Fundamental Frequency of One-Electrode MEMS Resonators

(2018) Jianxin Han et al.   Micromachines

Analysis of dynamic pull-in voltage of a graphene MEMS model

(2018) Piotr Skrzypacz et al.   NONLINEAR ANALYSIS-REAL WORLD APPLICATIONS

Reliability of electrostatically actuated MEMS resonators to random mass disturbance

(2018) Yan Qiao et al.   MECHANICAL SYSTEMS AND SIGNAL PROCESSING

A mechanical–thermal noise analysis of a nonlinear microgyroscope

(2017) S.A.M. Lajimi et al.   MECHANICAL SYSTEMS AND SIGNAL PROCESSING

A general closed-form solution for the static pull-in voltages of electrostatically actuated MEMS/NEMS

(2017) Ehsan Maani Miandoab et al.   PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES

Thermal resonant zeolite-based gas sensor

(2017) M. Denoual et al.   SENSORS AND ACTUATORS B-CHEMICAL

On-Chip Micro–Electro–Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing

(2016) Mazen Erfan et al.   APPLIED SPECTROSCOPY

Closed form solutions for nonlinear static response of curled cantilever micro-/nanobeams including both the fringing field and van der Waals force effect

(2016) Youhong Sun et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

MEMS thermal flow sensors

(2016) Chun-Hui Wu et al.   SENSORS AND ACTUATORS A-PHYSICAL

Piezoelectric polymer gated OFET: Cutting-edge electro-mechanical transducer for organic MEMS-based sensors

(2016) Damien Thuau et al.   Scientific Reports

Frequency-Modulated Lorentz Force Magnetometer With Enhanced Sensitivity via Mechanical Amplification

(2015) Mo Li et al.   IEEE ELECTRON DEVICE LETTERS

Extended Bandwidth Lorentz Force Magnetometer Based on Quadrature Frequency Modulation

(2015) Mo Li et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process

(2015) Adel Merdassi et al.   SENSORS

Noise Squeezing Controlled Parametric Bifurcation Tracking of MIP-Coated Microbeam MEMS Sensor for TNT Explosive Gas Sensing

(2014) Lily L. Li et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A bifurcation-based coupled linear-bistable system for microscale mass sensing

(2014) R.L. Harne et al.   JOURNAL OF SOUND AND VIBRATION

Bifurcation-based micro-/nanoelectromechanical mass detection

(2014) V.-N. Nguyen et al.   NONLINEAR DYNAMICS

Electrostatic pull-in instability in MEMS/NEMS: A review

(2014) Wen-Ming Zhang et al.   SENSORS AND ACTUATORS A-PHYSICAL

Bifurcation-based mass sensing using piezoelectrically-actuated microcantilevers

(2011) Vijay Kumar et al.   APPLIED PHYSICS LETTERS

Forecasting bifurcation morphing: application to cantilever-based sensing

(2011) Joosup Lim et al.   NONLINEAR DYNAMICS

Wireless Intraocular Pressure Sensing Using Microfabricated Minimally Invasive Flexible-Coiled LC Sensor Implant

(2010) Po-Jui Chen et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier

(2008) Hongwei Qu et al.   IEEE SENSORS JOURNAL

Using electric actuation and detection of oscillations in microcantilevers for pressure measurements

(2008) Gayatri Keskar et al.   SENSORS AND ACTUATORS A-PHYSICAL