Multi-arc ion plating and DC magnetron sputtering integrated technique for high-performance Al,C-co-doped δ-TiN quaternary films
出版年份 2021 全文链接
标题
Multi-arc ion plating and DC magnetron sputtering integrated technique for high-performance Al,C-co-doped δ-TiN quaternary films
作者
关键词
Integrated technique, TiAlCN quaternary films, Structure, Performance
出版物
CORROSION SCIENCE
Volume -, Issue -, Pages 109261
出版商
Elsevier BV
发表日期
2021-01-22
DOI
10.1016/j.corsci.2021.109261
参考文献
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