期刊
ACS APPLIED MATERIALS & INTERFACES
卷 13, 期 2, 页码 3387-3396出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsami.0c18767
关键词
Tellurium nanowire; gate-all-around MOSFETs; sub-5 nm FET; carrier mobility; quantum transport calculations
资金
- Wuhan University
- Fundamental Research Funds for the Central Universities
- EPSRC [EP/P005152/1]
- National Natural Science Foundation of China [11947218]
The study demonstrates that single trigonal-tellurium NW FETs outperform three trigonal-tellurium NW FETs, with the former achieving both high-performance and low-dissipation goals with a 5 nm gate length. The devices show promising results in terms of on-state current and subthreshold swing, indicating the potential of GAA Te MOSFETs for cutting-edge sub-5 nm device applications.
The nanowire (NW) and gate-all-around (GAA) technologies are regarded as the ultimate solutions to sustain Moore's law benefitting from the exceptional gate control ability. Herein, we conduct a comprehensive ab initio quantum transportation calculation at different diameters (single trigonal-tellurium NW (1Te) and three trigonaltellrium NW (3Te)) sub-5 nm tellurium (Te) GAA NW metal-oxidesemiconductor field-effect transistors (MOSFETs). The results claim that the performance of 1Te FETs is superior to that of 3Te FETs. Encouragingly, the single Te (1Te) n-type MOSFET with 5 nm gate length achieves International Technology Roadmap for Semiconductors (ITRS) high-performance (HP) and low-dissipation (LP) goals simultaneously. Especially, the HP on-state current reaches 6479 mu A/mu m, 7 times higher than the goal (900 mu A/mu m). Moreover, the subthreshold swing of the n-type 1Te FETs even hits a thermionic limit of 60 mV/dec. In terms of the spin-orbit coupling effect, the drain currents of devices are further improved, particularly the p-type Te FETs can also achieve the ITRS HP goal. Hence, the GAA Te MOSFETs provide a feasible approach for state-of-the-art sub-5 nm device applications.
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