High Si content TiSiN films with superior oxidation resistance

标题
High Si content TiSiN films with superior oxidation resistance
作者
关键词
Oxidation resistance, TiSiN, TiAlN, XPS, thin films
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 398, Issue -, Pages 126087
出版商
Elsevier BV
发表日期
2020-06-20
DOI
10.1016/j.surfcoat.2020.126087

向作者/读者发起求助以获取更多资源

Reprint

联系作者

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now