Tribological and mechanical properties of hardness-modulated TiAlSiN multilayer coatings fabricated by plasma immersion ion implantation and deposition
Tribological and mechanical properties of hardness-modulated TiAlSiN multilayer coatings fabricated by plasma immersion ion implantation and deposition
作者
关键词
Hardness-modulated, TiAlSiN multilayer, Tribological properties, Plasma immersion ion implantation and deposition
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