Nickel oxide (NiO) thin film optimization by reactive sputtering for highly sensitive formaldehyde sensing

出版年份 2020 全文链接

标题

作者

关键词

Nickel oxide (NiO), Reactive sputtering, Formaldehyde (HCHO), High sensitivity, Ar:O, 2, ratio

出版物

Volume 318, Issue -, Pages 128166

出版商

Elsevier BV

发表日期

2020-05-11

DOI

10.1016/j.snb.2020.128166

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