Hybrid micro-grinding process for manufacturing meso/micro-structures on monocrystalline silicon
出版年份 2020 全文链接
标题
Hybrid micro-grinding process for manufacturing meso/micro-structures on monocrystalline silicon
作者
关键词
-
出版物
MATERIALS AND MANUFACTURING PROCESSES
Volume -, Issue -, Pages 1-10
出版商
Informa UK Limited
发表日期
2020-09-03
DOI
10.1080/10426914.2020.1813890
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- A high-speed precision micro-spindle use for mechanical micro-machining
- (2019) Wei Li et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- Investigation of machining and wear performance of various diamond micro-grinding tools
- (2019) Wei Li et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- Error analysis of high-speed precision micro-spindle equipped with micro-tool in mechanical micro-grinding
- (2018) Wei Li et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- Experimental characterization on eco-friendly micro-grinding process of titanium alloy using air flow assisted electrospray lubrication with nanofluid
- (2018) Pil-Ho Lee et al. JOURNAL OF CLEANER PRODUCTION
- An experimental investigation of heat transfer performance of a flat plate heat pipe with a combined capillary structure
- (2018) Yiwei Wang et al. HEAT AND MASS TRANSFER
- Modeling and prediction research on wear of electroplated diamond micro-grinding tool in soda lime glass grinding
- (2017) Xuelong Wen et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- Investigation on size effect of specific cutting energy in mechanical micro-cutting
- (2017) Tao Zhang et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- Decoupling the Arrhenius equation via mechanochemistry
- (2017) Joel M. Andersen et al. Chemical Science
- Process chains for high-precision components with micro-scale features
- (2016) E. Uhlmann et al. CIRP ANNALS-MANUFACTURING TECHNOLOGY
- Study on force modeling considering size effect in ultrasonic-assisted micro-end grinding of silica glass and Al2O3 ceramic
- (2016) Zhang Jianhua et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- Micro grinding with ultra small micro pencil grinding tools using an integrated machine tool
- (2015) Jan C. Aurich et al. CIRP ANNALS-MANUFACTURING TECHNOLOGY
- Design and evaluation of a high-speed and precision microspindle
- (2014) W. Li et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- Experimental study of surface generation and force modeling in micro-grinding of single crystal silicon considering crystallographic effects
- (2013) J. Cheng et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
- Laser-assisted microgrinding of ceramics
- (2011) M. Kumar et al. CIRP ANNALS-MANUFACTURING TECHNOLOGY
- Electrochemical discharge dressing of metal bond micro-grinding tools
- (2010) Chenjun Wei et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
- Experimental characterization of micro-grinding process using compressed chilly air
- (2010) Pil-Ho Lee et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
- A multiprocess machine tool for compound micromachining
- (2009) M. Rahman et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
- Tool wear monitoring for micro-end grinding of ceramic materials
- (2009) J. Feng et al. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
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