Theoretical design and computational screening of precursors for atomic layer deposition

出版年份 2016 全文链接

标题

作者

关键词

Atomic layer deposition, Precursor design, Computational screening, Surface reactivity of the precursor

出版物

Volume 322, Issue -, Pages 94-103

出版商

Elsevier BV

发表日期

2016-06-04

DOI

10.1016/j.ccr.2016.05.011

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