Manufacturing intelligence for reducing false alarm of defect classification by integrating similarity matching approach in CMOS image sensor manufacturing

标题
Manufacturing intelligence for reducing false alarm of defect classification by integrating similarity matching approach in CMOS image sensor manufacturing
作者
关键词
Automatic optical inspection, Defect detection and classification, Data mining and big data analytics, Similarity matching, Yield enhancement, Manufacturing intelligence
出版物
COMPUTERS & INDUSTRIAL ENGINEERING
Volume 99, Issue -, Pages 465-473
出版商
Elsevier BV
发表日期
2016-05-05
DOI
10.1016/j.cie.2016.05.009

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