4.7 Article

Enhanced response of the photoactive gas sensor on formaldehyde using porous SnO2@TiO2 heterostructure driven by gas-flow thermal evaporation and atomic layer deposition

期刊

CERAMICS INTERNATIONAL
卷 47, 期 5, 页码 5985-5992

出版社

ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2020.10.172

关键词

HCHO gas sensor; Photoactive gas sensor; Metal oxide heterostructure; Thermal evaporation; Atomic layer deposition; Porous structure

资金

  1. Technology Innovation Program [20010727]
  2. Ministry of Trade, Industry and Energy

向作者/读者索取更多资源

The nanoporous SnO2@TiO2 heterostructure was synthesized through a modified thermal evaporation and atomic layer deposition process, enabling high sensitivity detection of formaldehyde. This structure exhibited a low detection limit, good linearity range, and high response, paving the way for exploring various applications such as biosensors, photocatalysts, and optoelectronic devices.
Nanoporous SnO2@TiO2 heterostructure was synthesized by a facile two-step dry process, modified thermal evaporation followed by atomic layer deposition (ALD). The introduction of inert gas, Ar, with a pressure of 0.2 Torr during thermal evaporation of SnO, enabled the formation of the nanoporous 3D structure by inducing the collision and loss of kinetic energy during deposition. A photocatalytic material, TiO2, was grown on the porous structure of SnO2 to detect target gas, formaldehyde, under UV irradiation selectively. Microstructural and elemental analysis with a transmission electron microscope and X-ray photoelectron spectroscopy confirmed the porous structure of SnO2 induced by our evaporation process as well as the conformal coating of TiO2 on the porous structure. The sensing capabilities of a photoactive sensor on the formaldehyde were assessed in terms of the film porosity, irradiated UV power, and thickness of photoactive materials at room temperature. As a result, the SnO2@TiO2 heterostructure, with an optimum thickness of TiO2 exhibited low detection limit, down to 0.1 ppm, good linearity to the concentration of formaldehyde in the range of 0.1-10 ppm, and high response of 15% in the HCHO 0.1 ppm. This core-shell porous structure developed by modified thermal evaporation combined with ALD paved the way for 3D architectures to explore various applications, such as biosensors, photocatalysts, and optoelectronic devices.

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