4.8 Article

Epitaxial Combination of Two-Dimensional Hexagonal Boron Nitride with Single-Crystalline Diamond Substrate

期刊

ACS APPLIED MATERIALS & INTERFACES
卷 12, 期 41, 页码 46466-46475

出版社

AMER CHEMICAL SOC
DOI: 10.1021/acsami.0c11883

关键词

hexagonal boron nitride; diamond; 2D; MOVPE; single-crystalline

资金

  1. MEXT Program for research and development of next-generation semiconductor to realize energy-saving society [JPJ005357]
  2. MOST-SKRDP [2016YFE0118400]
  3. NSFC [U1604263]

向作者/读者索取更多资源

Hexagonal boron nitride (hBN) and diamond are promising materials for next-generation electronics and optoelectronics. However, their combination is rarely reported. In this study, we for the first time demonstrate the success to direct growth of two-dimensional (2D) hBN crystal layers on diamond substrates by metalorganic vapor phase epitaxy. Compared with the disordered growth we found on diamond (100), atomic force microscopy, X-ray diffraction, and transmission electron microscopy results all support 2D hBN with highly oriented lattice formation on diamond (111). Also, the epitaxial relationship between hBN and diamond (111) substrate is revealed to be [0 0 0 1](hBN) // [1 1 1](diamond) and [1 0 (1) over bar 0](hBN) // [1 1 (2) over bar](diamond) The valence band offset at hBN/diamond (111) heterointerface determined by X-ray photoelectron spectroscopy is 1.4 +/- 0.2 eV, thus yielding a conduction band offset of 1.0 +/- 0.2 eV and type II staggered band alignment with a bandgap of 5.9 eV assumed for hBN. Furthermore, prior thermal cleaning of diamond in a pure H-2 atmosphere smoothens the surface for well-ordered layered hBN epitaxy, while thermal cleaning in a mixed H-2 and NH3 atmosphere etches the diamond surface, creating many small faceted pits that destroy the following epitaxy of hBN.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.8
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

Article Materials Science, Coatings & Films

Interface characteristics of β-Ga2O3/Al2O3/Pt capacitors after postmetallization annealing

Masafumi Hirose, Toshihide Nabatame, Yoshihiro Irokawa, Erika Maeda, Akihiko Ohi, Naoki Ikeda, Liwen Sang, Yasuo Koide, Hajime Kiyono

Summary: The study found that postmetallization annealing (PMA) at lower temperatures (300-600 degrees C) significantly improved the interface properties of transistors, while annealing at higher temperatures (700-900 degrees C) led to large frequency dispersion, high fixed charge, and interface state density.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2021)

Article Physics, Applied

Thermal mismatch induced stress characterization by dynamic resonance based on diamond MEMS

Huanying Sun, Xiulin Shen, Liwen Sang, Masataka Imura, Yasuo Koide, Jianqiang You, Tie-Fu Li, Satoshi Koizumi, Meiyong Liao

Summary: In this study, the thermal mismatch induced stress was precisely measured using the dynamic resonance method on a single-crystal diamond microelectromechanical resonator. The results indicated a linear relationship between the resonance frequency and the induced stress, with a stress resolution as precise as 10(4) Pa, which is three orders of magnitude better than traditional Raman and X-ray diffraction methods.

APPLIED PHYSICS EXPRESS (2021)

Article Chemistry, Multidisciplinary

The electric double layer effect and its strong suppression at Li+ solid electrolyte/hydrogenated diamond interfaces

Takashi Tsuchiya, Makoto Takayanagi, Kazutaka Mitsuishi, Masataka Imura, Shigenori Ueda, Yasuo Koide, Tohru Higuchi, Kazuya Terabe

Summary: The study demonstrates that the electric double layer effect with different solid electrolytes can be evaluated using hydrogenated diamond-based transistors, where the transistor with Li-Si-Zr-O solid electrolyte shows significant EDL-induced hole density modulation, while the one with Li-La-Ti-O solid electrolyte shows minimal enhancement, possibly due to charge neutralization in the LLTO caused by variation in the valence state of the Ti ions.

COMMUNICATIONS CHEMISTRY (2021)

Article Physics, Applied

Polarization-induced hole doping for long-wavelength In-rich InGaN solar cells

Liwen Sang, Masatomo Sumiya, Meiyong Liao, Yasuo Koide, Xuelin Yang, Bo Shen

Summary: In this study, a polarization-induced (PI) hole doping method was used to achieve high hole mobility in In-rich InGaN. The In-rich InGaN solar cell with PI doped p-type InGaN showed improved conversion efficiency by over 1.5 times compared to single-layer p-type InGaN.

APPLIED PHYSICS LETTERS (2021)

Article Engineering, Electrical & Electronic

Investigation of Ohmic Contact Resistance, Surface Resistance, and Channel Resistance for Hydrogen-Terminated Diamond MOSFETs

Jiangwei Liu, Hirotaka Ohsato, Bo Da, Yasuo Koide

Summary: The ohmic contact resistance, surface resistance, and channel resistance of H-terminated diamond MOSFETs were investigated. It was found that the surface resistance accounts for 75.3% of the total resistance in the planar-type H-diamond MOSFET, limiting its leakage current and extrinsic transconductance, while the ohmic contact resistance occupies 38.8% of the total resistance in the T-type H-diamond MOSFET.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2022)

Article Materials Science, Coatings & Films

Influence of HfO2 and SiO2 interfacial layers on the characteristics of n-GaN/HfSiOx capacitors using plasma-enhanced atomic layer deposition

Toshihide Nabatame, Erika Maeda, Mari Inoue, Masafumi Hirose, Yoshihiro Irokawa, Akihiko Ohi, Naoki Ikeda, Takashi Onaya, Koji Shiozaki, Ryota Ochi, Tamotsu Hashizume, Yasuo Koide

Summary: The study explores the growth per cycle (GPC) of SiO2 and HfO2 on different substrates, and the characteristics of capacitors with inserted interface layers. Results suggest that Hf-rich HfSiOx plays a significant role in improving the electrical properties of capacitors.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2021)

Article Nanoscience & Nanotechnology

Improvement of structural quality of AlN layers grown on c-plane sapphire substrate by metal-organic vapor phase epitaxy using post-growth annealing with trimethylgallium

Masataka Imura, Hideki Inaba, Takaaki Mano, Nobuyuki Ishida, Fumihiko Uesugi, Yoko Kuroda, Yoshiko Nakayama, Masaki Takeguchi, Yasuo Koide

Summary: The structural quality of AlN layers grown on a sapphire substrate using metal-organic vapor phase epitaxy (MOVPE) was significantly improved by post-growth annealing, resulting in a smoother surface and better crystal quality. This work has implications for the industrial production of AlxGa1-xN-based ultraviolet light-emitters.

AIP ADVANCES (2022)

Article Chemistry, Physical

Oxide Scale Sublimation Chemical Vapor Deposition for Controllable Growth of Monolayer MoS2 Crystals

Xu Yang, Shisheng Li, Naoki Ikeda, Yoshiki Sakuma

Summary: A newly developed oxide scale sublimation chemical vapor deposition (OSSCVD) technique for 2D MoS2 growth is reported, allowing stable growth by controlling the supply of MoO3. Using Dragontrail glass as a catalytic substrate enables the growth of large single-crystalline MoS2 domains.

SMALL METHODS (2022)

Article Microscopy

Stress effect on the resonance properties of single-crystal diamond cantilever resonators for microscopy applications

Xiulin Shen, Zhenfei Lv, Kimiyoshi Ichikawa, Huanying Sun, Liwen Sang, Zhaohui Huang, Yasuo Koide, Satoshi Koizumi, Meiyong Liao

Summary: This paper focuses on the micro-cantilever beams used in surface sensing applications and atomic force microscopy. Single-crystal diamond (SCD) cantilever beams fabricated by a smart-cut method were characterized for stress using surface geometry curvature observation and Raman microscopy. The results showed that although there was surface stress in the SCD cantilever beams, their resonance properties remained excellent in terms of rigidity and quality, making them a promising platform for high-reliability microscopy applications.

ULTRAMICROSCOPY (2022)

Article Materials Science, Multidisciplinary

Effect of gas pressure on the quality-factor of single-crystal diamond micro cantilevers

Yinling Chen, Liwen Sang, Satoshi Koizumi, Yasuo Koide, Xiaoxi Liu, Meiyong Liao

Summary: In this study, we investigated the effect of ambient gas pressure on the quality factor of single-crystal diamond micro cantilevers. The results show that the quality factor remains stable at low pressures but decreases significantly as the pressure increases.

DIAMOND AND RELATED MATERIALS (2022)

Article Physics, Applied

Natural band alignment of BAlN and BGaN alloys

Yuichi Ota, Masataka Imura, Ryan G. Banal, Yasuo Koide

Summary: The natural band alignment of BAlN and BGaN alloys was investigated using the atomic solid-state energy scale approach, and it was found that they behave according to the common anion rule. The Schottky barrier height (SBH) was calculated based on the results of band alignment, providing important guidelines for boron nitride and its alloy device design.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2022)

Article Materials Science, Multidisciplinary

Comparison of Hydrogen-Induced Oxide Charges Among GaN Metal-Oxide-Semiconductor Capacitors with Al2O3, HfO2, or Hf0.57Si0.43Ox Gate Dielectrics

Yoshihiro Irokawa, Mari Inoue, Toshihide Nabatame, Yasuo Koide

Summary: The effect of hydrogen on GaN metal-oxide-semiconductor (MOS) capacitors with different gate dielectrics was studied using C-V measurements. Hydrogen exposure caused a negative shift in C-V curves, and the response was reversible. Application of a reverse gate bias accelerated the reversion, indicating hydrogen absorption into the dielectric as positive charges.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2022)

Article Chemistry, Physical

Highly Efficient Deposition of Centimeter-Scale MoS2 Monolayer Film on Dragontrail Glass with Large Single-Crystalline Domains

Xu Yang, Shisheng Li, Yoshiki Sakuma

Summary: A highly efficient method for growing large-area MoS2 monolayer films in a short time is reported. The technique of oxide scale sublimation chemical vapor deposition (OSSCVD) allows for ultrafast deposition of MoS2 on a Dragontrail glass substrate, maintaining large-sized single-crystalline domains over 20 mu m. The gas-controlled OSSCVD with a showerhead configuration enables homogeneous and controllable source supply, resulting in high-quality monolayer MoS2 films with centimeter-scale uniformity. Field-effect transistors fabricated on the films exhibit excellent performance, surpassing results obtained using longer deposition time and higher temperatures. This study highlights the potential for low-cost high-throughput production of large-area high-quality monolayer MoS2.

SMALL METHODS (2022)

Article Chemistry, Physical

Scalable growth of atomically thin MoS2 layers in a conventional MOCVD system using molybdenum dichloride dioxide as the molybdenum source

Xu Yang, Shisheng Li, Naoki Ikeda, Akihiro Ohtake, Yoshiki Sakuma

Summary: In order to bring atomically thin transition metal dichalcogenides (TMDs) to practical application, a highly reproducible process for large-scale growth is developed. This process involves using molybdenum dichloride dioxide (MoO2Cl2) as the Mo source and integrating it with a standard low-pressure cold-wall MOCVD system. With H2S as the sulfur source and Dragontrail glass (DT-glass) as the substrate, the researchers achieved the growth of carbon-free MoS2 monolayers with high quality and uniformity. This work provides a new method for the large-scale production of high-quality MoS2 monolayers.

APPLIED SURFACE SCIENCE (2023)

Article Chemistry, Multidisciplinary

Highly-crystalline 6 inch free-standing GaN observed using X-ray diffraction topography

Jaemyung Kim, Okkyun Seo, L. S. R. Kumara, Toshihide Nabatame, Yasuo Koide, Osami Sakata

Summary: The crystal quality of a 6 inch free-standing GaN substrate grown using a Na-flux based liquid phase epitaxy method was demonstrated by recording rocking curve profiles and analyzing lattice plane anisotropic bowing. The competition between crystallinity and homogeneity was observed in the substrate, with a mean rocking curve width of 0.024 degrees indicating almost single crystal quality.

CRYSTENGCOMM (2021)

暂无数据