Interplay between solution chemistry and mechanical activation in friction-induced material removal of silicon surface in aqueous solution

出版年份 2020 全文链接

标题

作者

关键词

Mechanochemical etching, Surface structure dependence, pH dependence, Silicon, Chemical mechanical polishing

出版物

Volume 148, Issue -, Pages 106319

出版商

Elsevier BV

发表日期

2020-03-23

DOI

10.1016/j.triboint.2020.106319

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