Mechanistic Investigation on Thermal Atomic Layer Deposition of Group 13 Oxides

标题
Mechanistic Investigation on Thermal Atomic Layer Deposition of Group 13 Oxides
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 124, Issue 31, Pages 17121-17134
出版商
American Chemical Society (ACS)
发表日期
2020-07-16
DOI
10.1021/acs.jpcc.0c04872

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