Synthesis, structure and optical properties of high-quality VO2 thin films grown on silicon, quartz and sapphire substrates by high temperature magnetron sputtering: Properties through the transition temperature

标题
Synthesis, structure and optical properties of high-quality VO2 thin films grown on silicon, quartz and sapphire substrates by high temperature magnetron sputtering: Properties through the transition temperature
作者
关键词
VO, 2, thin films, Sputtering, Substrate material, Insulator-to-metal transition, Interface, Epitaxial growth, HRTEM study, Optical properties
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume -, Issue -, Pages 156323
出版商
Elsevier BV
发表日期
2020-07-31
DOI
10.1016/j.jallcom.2020.156323

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