Open-air-type Ar + H2O plasma treatment of polytetrafluoroethylene for improving Ag/PTFE adhesion strength: application to highly adhesive Ag direct wiring patterns

标题
Open-air-type Ar + H2O plasma treatment of polytetrafluoroethylene for improving Ag/PTFE adhesion strength: application to highly adhesive Ag direct wiring patterns
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 59, Issue 7, Pages 077004
出版商
IOP Publishing
发表日期
2020-06-16
DOI
10.35848/1347-4065/ab9cd7

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