Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

标题
Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
出版商
IOP Publishing
发表日期
2020-05-16
DOI
10.1088/1361-6595/ab9374

向作者/读者发起求助以获取更多资源

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now