Multiscale micro-/nanostructures on single crystalline SiC fabricated by hybridly polarized femtosecond laser

标题
Multiscale micro-/nanostructures on single crystalline SiC fabricated by hybridly polarized femtosecond laser
作者
关键词
Femtosecond laser, Hybrid vector beam, Multiscale micro-/nanostructures, 4H-SiC
出版物
OPTICS AND LASERS IN ENGINEERING
Volume 127, Issue -, Pages 105940
出版商
Elsevier BV
发表日期
2019-11-15
DOI
10.1016/j.optlaseng.2019.105940

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