期刊
NANO LETTERS
卷 20, 期 5, 页码 3019-3029出版社
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.9b04940
关键词
e-beam; quantitative analysis; CASINO; silicon nitride; thermal conductivity
类别
资金
- Air Force Office of Scientific Research [FA9550-18-1-0086]
- National Science Foundation [1637370]
- Molecular Foundry [5842, 6166]
- NSF Graduate Research Fellowship [DGE 1752814]
- Office of Science, Office of Basic Energy Sciences, Scientific User Facilities Division, of the U.S. Department of Energy [DE-AC0205CH11231]
- Directorate For Engineering [1637370] Funding Source: National Science Foundation
- Div Of Chem, Bioeng, Env, & Transp Sys [1637370] Funding Source: National Science Foundation
The electron beam (e-beam) in the scanning electron microscopy (SEM) provides an appealing mobile heating source for thermal metrology with spatial resolution of similar to 1 nm, but the lack of systematic quantification of the e-beam heating power limits such application development. Here, we systemically study ebeam heating in LPCVD silicon nitride (SiNx) thin-films with thickness ranging from 200 to 500 nm from both experiments and complementary Monte Carlo simulations using the CASINO software package. There is good agreement about the thickness-dependent e-beam energy absorption of thin-film between modeling predictions and experiments. Using the absorption results, we then demonstrate adapting the e-beam as a quantitative heating source by measuring the thickness-dependent thermal conductivity of SiN(x )thin-films, with the results validated to within 7% by a separate Joule heating experiment. The results described here will open a new avenue for using SEM e-beams as a mobile heating source for advanced nanoscale thermal metrology development.
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