期刊
JOURNAL OF APPLIED PHYSICS
卷 127, 期 19, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.5143266
关键词
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资金
- Sandia National Laboratories (SIGMA-NONLin Project)
- National Science Foundation (NSF) [EFMA-1640968]
- Deutsche Forschungsgemeinschaft (DFG) [EN 434/41-1, EN 434/40-1]
- Volkswagen Foundation (Volkswagen Stiftung) [90261]
Quasi-phase-matched grating structures in lithium niobate waveguides with sub-micrometer periodicities will benefit the development of short-wavelength nonlinear optical devices. Here, we report on the reproducible formation of periodically poled domains in x-cut single-crystalline thin-film lithium niobate with periodicities as short as 600nm. Shaped single-voltage poling pulses were applied to electrode structures that were fabricated by a combination of electron-beam and direct-writing laser lithography. Evidence of successful poling with good quality was obtained through second-harmonic microscopy and piezoresponse force microscopy imaging. For the sub-micrometer period structures, we observed patterns with a double periodicity formed by domain interactions and features with sizes <200nm.
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