Influence of external swelling stress on the frequency characteristics of a volatile organic compound (VOC) sensor based on a polymer-coated film bulk acoustic resonator (FBAR)

标题
Influence of external swelling stress on the frequency characteristics of a volatile organic compound (VOC) sensor based on a polymer-coated film bulk acoustic resonator (FBAR)
作者
关键词
-
出版物
INSTRUMENTATION SCIENCE & TECHNOLOGY
Volume 48, Issue 4, Pages 431-442
出版商
Informa UK Limited
发表日期
2020-03-10
DOI
10.1080/10739149.2020.1737540

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