标题
A microplasma process for hexagonal boron nitride thin film synthesis
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 116, Issue 17, Pages 171902
出版商
AIP Publishing
发表日期
2020-04-28
DOI
10.1063/1.5143948
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- Experimental characterization of a ns-pulsed micro-hollow cathode discharge (MHCD) array in N2/Ar mixture.
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