Molecular Sieve Based on a PMMA/ZIF-8 Bilayer for a CO-Tolerable H2 Sensor with Superior Sensing Performance

Semiconductor sensors equipped with Pd catalysts are promising candidates as low-powered and miniaturized surveillance devices that are used to detect flammable hydrogen (H-2) gas. However, the following issues remain unresolved: (i) a sluggish sensing speed at room temperature and (ii) deterioration of sensing performance caused by interfering gases, particularly, carbon monoxide (CO). Herein, a bilayer comprising poly(methyl methacrylate) (PMMA) and zeolitic imidazolate framework-8 (ZIF-8) is utilized as a molecular sieve for diode-type H-2 sensors based on a Pd-decorated indium-gallium-zinc oxide film on a p-type silicon substrate. While the PMMA effectively blocks the penetration of CO gas molecules into the sensing entity, the ZIF-8 improves sensing performances by modifying the catalytic activity of Pd, which is preferable for splitting H-2 and O-2 molecules. Consequently, the bilayer-covered sensor achieves outstanding CO tolerance with superior sensing figures of merit (response/recovery times of <10 s and sensing response of >5000% at 1% H-2).