标题
Review of MEMS Based Fourier Transform Spectrometers
作者
关键词
-
出版物
Micromachines
Volume 11, Issue 2, Pages 214
出版商
MDPI AG
发表日期
2020-02-21
DOI
10.3390/mi11020214
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- A MEMS Based Fourier Transform Spectrometer and Its Scan Stability Study
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- High-performance and scalable on-chip digital Fourier transform spectroscopy
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- A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range
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- Applications of Micro-Fourier Transform Infrared Spectroscopy (FTIR) in the Geological Sciences—A Review
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- Hysteresis Property of Tip-Tilt-Piston Micromirror Based on Tilt-and-Lateral Shift-Free Piezoelectric Unimorph Actuator
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- Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers
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- MEMS Laser Scanners: A Review
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- A tip–tilt–piston micromirror with a double S-shaped unimorph piezoelectric actuator
- (2013) Wenjing Liu et al. SENSORS AND ACTUATORS A-PHYSICAL
- Applications of near-infrared spectroscopy to process analysis using fourier transform spectrometer
- (2010) Masahiro Watari OPTICAL REVIEW
- Lamellar grating optimization for miniaturized fourier transform spectrometers
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- Thin-Film PZT Lateral Actuators With Extended Stroke
- (2008) K.R. Oldham et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- An Electrothermomechanical Lumped Element Model of an Electrothermal Bimorph Actuator
- (2008) S.T. Todd et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- A large vertical displacement electrothermal bimorph microactuator with very small lateral shift
- (2007) Lei Wu et al. SENSORS AND ACTUATORS A-PHYSICAL
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