4.6 Article

High-quality integrated microdisk resonators in the visible-to-near-infrared wavelength range on a 3C-silicon carbide-on-insulator platform

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OPTICS LETTERS
卷 45, 期 1, 页码 153-156

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OPTICAL SOC AMER
DOI: 10.1364/OL.45.000153

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  1. Air Force Office of Scientific Research [FA9550-15-1-0342]
  2. Office of Naval Research [N00014-15-1-2081]

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In this Letter, we report, to the best of our knowledge, the first demonstration of high-quality integrated microdisk resonators (MDRs) on a 3C-silicon carbide-on-insulator (SiCOI) platform, working over a wide bandwidth from visible to near-infrared wavelengths. We show record-high quality factors for 3C-silicon carbide (SiC) MDRs of 242,000, 112,000, and 83,000 at the wavelengths of 1550 nm, 770 nm, and 650 nm, respectively, based on high-quality 3C-SiC films with the surface roughness as low as 1.4 angstrom, achieved by sample-transfer bonding, and precise chemical-mechanical polishing of the SiC film, to remove growth defects. Our study of 3C-SiC films grown on Si using transmission electron microscopy shows that even considerably higher-quality single-crystalline SiCOI can be achieved by flipping and thinning down an ultra-thick (similar to 5-10 mu m) 3C-SiC film grown on Si. The SiCOI platform can be used to realize ultra-wideband high-quality SiC devices that are desirable for applications in nonlinear and quantum photonics. (C) 2019 Optical Society of America

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